GCA 6100C Wafer Stepper

 

After some years of wanting a stepper I finally managed to find one in mediocre shape for $1000. Getting it up and running is still easier than building a stepper from scratch, though!

The system came complete with a rack of 80s electronics, but my rough plan is to keep the arc lamp driver and replace the stage controls with modern parts; after all, the stage controller is just 8 H-bridges.

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